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9922 East Montgomery Avenue, #7
Spokane, WA 99206, USA
Telephone: 509.892-1114
Facsimile: 509.892-1116
Email: info@galaxywafer.com
Galaxy Compound Semiconductors Inc.
is a division of IQE plc www.iqep.com
© Galaxy Compound Semiconductors, Inc. 2024
Material Assessment
Characterization:
Galaxy Compound Semiconductor, Inc. employs a comprehensive set of materials characterization tools to ensure full conformity of product supplied. All assessment is managed according to ISO9001:2015 certified quality control systems.
| Structure | |
|---|---|
| Surface and Flat Orientation | Philips Laue Orientation System Rigaku 2991F2 Dual Station X-ray Diffractometer |
| Defect Density | Etching and microscopic inspection |
| Bulk Properties | |
|---|---|
| Carrier concentration | Hewlett Packard Hall Effect Test System |
| Mobility | Hewlett Packard Hall Effect Test System |
| Resistivity | Hewlett Packard Hall Effect Test System |
| Wavelength Transparency | Perkin Elmer Fourier Transform Infrared Spectrometer |
| Dimensional Control | |
|---|---|
| Flat lengths | Mitutoyo Optical Comparator |
| Diameter | As Above |
| Edge Profile | As Above |
| Thickness | Mitutoyo Calipers and Micrometers Keyence GT2-A12K Digital Contact Sensor Keyence LK-G10 CCD Laser Displacement Sensor |
| Flatness (TTV, TIR, Bow, Warp) | Wyko 600D Interferometer Tropel FM100 Flatmaster |
| Polish Quality | |
|---|---|
| Surface Morphology | Nikon Optiphot 66 Nomarski Microscopes |
| Haze and Particulates | KLA-Tencor Surfscan 6220 Collimated Light Inspection |
| 'Epi-readiness' | MBE via IQE Group Growth Testing Service |
Metrology is a critical aspect of product conformity. As a member of IQE plc, Galaxy's characterization portfolio additionally extends to the regular use of an extensive group metrology service which is comprised of many state-of-the-art wafer assessment tools. These include advanced surface analysis by atomic force microscopy (Veeco Digital Instruments D13100) and 3D surface profilometry (Taylor Hobson Talysurf CCI 3000). Further electrical measurements are made using contactless sheet resistance (Lehighton LEI 1500RS). Layer thickness determination can be made by spectroscopic ellipsometry and infrared microscopy (Film Expert MKS 2140). Combined with our own in-house range of material assessment tools, Galaxy is able to deliver the highest quality GaSb and InSb substrates.